Hexafluoroacetone (HFA): Fluorine core functional monomer for deep UV photoresist

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1. Product definition and characteristics Hexafluoroacetone (HFA) is an organic fluorine compound. All six hydrogen atoms in its molecule are replaced by fluorine atoms. It is similar in structure to acetone but has completely different properties. Hexafluoroacetone is very stable to heat and does not decompose significantly when heated for a long time at 300°C. It begins to crack at temperatures above 550°C to produce hexafluoroethane, difluorocarbon, etc. Hexafluoroacetone is a fluorine-containing fine chemical with a wide range of uses. It was first produced in the laboratory by direct fluorination of acetone in 1941, and was successfully piloted by United Chemical Company and DuPont in the 1960s. It can undergo specific condensation reaction with aromatic compounds to generate 2-hydroxyhexafluoroisopropyl (HHFIP) functional group. This group combines the acid-base response activity of phenolic hydroxyl groups with the short-wave light transmission advantages of fluorine materials, and has become the core of deep ultraviolet and electron beam advanced photoresist systems. 2. Production process There are mainly three methods for industrial preparation of hexafluoroacetone:: 1. Hexachloroacetone gas phase exchange method: Hexachloroacetone and anhydrous hydrogen fluoride are produced by gas phase exchange reaction in the presence of chromium catalyst. The reaction formula is (CCl₃)₂CO + 6 HF → (CF₃)₂CO + 6 HCl. If the chlorine-fluorine exchange is incomplete, partially fluorinated perfluorochloroacetone by-product will be generated 2. Hexafluoropropylene oxide rearrangement method: Using hexafluoropropylene oxide as raw material, in the presence of Sb₂O₅ catalyst,