Physical properties of materials such as trichlorosilane
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Does anyone know where I can find the physical parameters of materials used in polysilicon production, such as trichlorosilane and silicon tetrachloride? Information like vaporization latent heat (phase transition enthalpy), molar formation enthalpy, molar combustion enthalpy, and standard entropy can be obtained from these sources Could you share it~~ Thank you
Where can I find this data? Please advise, experts. . . . . . . . . . . . .
This post was last edited by jl_1016 on 2012-6-24 at 18:20. Just search on Baidu and you’ll know. You can find it by googling it. You’ll know better with a quick search.
HANDBOOK OF SEMICONDUCTOR SILICON TECHNOLOGY