Saturated vapor pressure of trichlorosilane, silicon tetrachloride, and dichlorosilane
Thread Content
Please ask my friends: Does anyone have any information on the saturated vapor pressure of trichlorosilane, silicon tetrachloride, and dichlorodihydrogen silicon at different temperatures between 0 and 100 degrees? I need it urgently! Please help! Thank you!
You can check it yourself in Lang's Chemistry Handbook.
You can check the data of pure components on the Internet, but it is difficult to find the data of mixed components, and the simulations are not accurate. Haha, this is another polysilicon company.
Check the literature and fit it yourself. Precision distillation requires correction of thermodynamic parameters. If you are in a hurry, you can buy it on the DECHEMA database.
Is there any thermodynamic data in Lang's Chemistry Handbook?