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Bordong KRI RF Ion Source RFICP 325 with Auxiliary LED-DBR Coating

2020-07-21 View Original

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Optical coating is present everywhere in our lives, ranging from precision and optical equipment/display devices to optical film applications in daily life; for example, glasses we wear regularly, digital cameras, various household appliances, as well as the anti-counterfeiting technologies used on banknotes can all be considered extensions of optical film technology applications. Without optical film technology as a foundation for development, modern optoelectronic/communication or laser technologies would not have been able to advance, which underscores the importance of research and development in this field. To improve the quality of coatings, coating manufacturers typically use ion sources to assist in the coating process, as shown in the figure below. As requirements for coating quality continue to rise, using Hall ion sources for this purpose is no longer sufficient for high-end coating applications. A well-known LED manufacturer in China, upon our recommendation, installed the RFICP 325 radio frequency ion source in its 1650 mm evaporation coating machine. This enabled the successful coating of high-end optical lenses, with those coatings passing all relevant testing procedures! Customer case study of Shanghai Hakuto’s KRI RFICP 325 radio frequency ion source: A well-known LED manufacturer in China. 1. Application of the ion source: LED-DBR coating production. 2. System capabilities: 1650 mm-sized electron gun evaporation coating machine. 3. Ion source: The American KRI RFICP 325 radio frequency ion source is used. The ion beam provided by the RFICP 325 ion source – both in terms of ion energy and density – is among the highest standards in the industry. Its special E22 Grided gate design allows it to cover a wide range of substrate holders in 1650 mm-sized evaporation machines, resulting in optimal productivity in terms of both yield and uniformity. 4. Functions of the ion source: By utilizing the RFICP 325 ion source for ion-assisted coating (IBAD) and pre-cleaning processes, the LED-DBR products manufactured using this system perform better than those produced with ordinary ion sources used in other machines, especially when it comes to brightness tests, stripping tests, pin tests, and optical properties. Installation example of Shanghai Hakuto’s radio frequency ion source: The KRI RFICP 325 ion source was installed in a 1650 mm-sized electron gun evaporation coating machine. Test example using the KRI ion source: LED-DBR stripping test. 1. Inspection of the stripped samples under a high-power microscope. 2. Test results: Using other brand ion sources – problems with sample edges breaking off; using Shanghai Hakuto’s KRI RFICP 325 ion source – no such problems with sample edges. Hakuto is an authorized distributor of renowned imported brands such as German Pfeiffer vacuum pumps, leak detectors, mass spectrometers, vacuum gauges, American KRI Kaufman ion sources, American inTEST high and low temperature shock testers, American Ambrell induction heating equipment, and Japanese NS ion etching machines. If you would like more detailed information or to discuss further, please contact us at the following addresses: Shanghai Hakuto: Mr. Luo; Taiwan Hakuto: Ms. Wang. Tel: +86-21-5046-1322; Tel: +886-3-567-9508 ext 161. Fax: +86-21-5046-1490; Fax: +886-3-567-0049. Mobile: +86 152-0195-1076; Mobile: +886-939-653-958. Email: ec@hakuto-vacuum.cn; Email: ec@hakuto.com.tw. Websites: www.hakuto-china.cn; www.hakuto-vacuum.com.tw. All rights reserved by Hakuto. Any unauthorized copying is prohibited!

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