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Plasma heating technology is used in the polysilicon industry

2009-01-21View Original

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Since I am not yet very familiar with this industry, many specific details have not been mentioned. It’s mainly because I’m afraid of saying something wrong and being laughed at by everyone. But if anyone is interested, feel free to ask; we’ll share whatever we know. Everyone is welcome to join the discussion! Let me start by stating my questions: 1. Our customers should be using the modified Siemens process, in which plasma is used in the reduction furnace, thereby allowing them to bypass the high-voltage stage. Then, in the polysilicon plants that everyone is familiar with, has anyone considered using plasma heating? 2. There are various processes for polysilicon production; apart from the improved Siemens method, can plasma heating be used in other processes as well? This post was last edited by LHY8771 on 2009-1-22 09:15.]
Reply #22009-01-22
Currently, high-pressure compression technology is widely used for polysilicon production in China, as it is mature, easy to operate, and fast; plasma heating is rarely used
Reply #32009-01-23
We use plasma heating; the first pair of silicon rods become conductive after 4 minutes, and all of them become conductive after 8 minutes. Moreover, the actual output only uses 60% of the designed power. Can high pressure achieve such an effect?
Reply #42009-01-23
What do you do after it turns on? Remove the plasma, replace it.......... If a slight positive pressure of hydrogen is used, safety considerations must also be taken into account ; Besides, the speed of high-pressure forcing is no slower than yours; with properly matched resistances, it’s not difficult to complete one phase and four pairs in 1 minute, so the startup speed remains fast as well. There are still people in China who use plasma technology, but that was years ago; it’s likely that such use is now very rare. The maturity and widespread adoption of high-pressure suppression technology represent the prevailing trend.
Reply #52009-01-23
May I ask the original poster: What gas is used as the medium in your plasma?
Reply #62009-01-23
I once attended a lecture in which it was said that plasma is an expensive technology. I’m not sure what the difference is between plasma heating and high-voltage inductive heating Could LZ please explain? Thank you so much!
Reply #72009-02-01
Nitrogen is used. Thank you for following!
Reply #82009-02-01
It’s better to use high pressure then, the trend.
Reply #92009-02-01
May I ask what type of lecture you are attending? Because plasma has different properties at different temperatures, its applications also vary. For example, the sun is also plasma. I am not familiar with high-voltage inductive heating, so I can’t make any comparisons. I’ll just share my views on plasma heating: Since plasma can reach very high temperatures, such as over 5000K, it is possible to generate a high level of heat output; for example, the equipment manufactured by our company is capable of producing over 200KW of heat. Of course, it can be lowered if necessary. So, from a heating perspective, it can be controlled flexibly. When it comes to spending money, do I think low efficiency could be one of the reasons? Because after extremely high plasma is generated, the equipment itself needs to be cooled and protected, which removes some of the heat, thereby naturally reducing the actual heating efficiency. However, since plasma is used for a short period of time and consumes less electricity in total, it is likely not to be a major concern.
Reply #102009-02-01
Plasma heating is not widely used in the polysilicon industry; its effectiveness remains to be seen. There is no specific information on cost, safety, stability, etc.
Reply #112009-02-01
High voltage requires proper insulation; otherwise, there is a risk of breakdown

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