Effect of dichlorosilane on the reduction of polysilicon
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If high-purity TCS contains 1-2% dichlorosilane and is mixed with hydrogen and then passed into the reduction furnace, will there be any adverse consequences? I hope you guys can enlighten me!
In my personal opinion, there will be no negative effects below 5%. When the reduction reaction occurs after the mixed gas enters the reduction furnace, it is accompanied by the thermal decomposition reaction of trichlorosilane itself, generating dichlorosilane. According to the equilibrium mechanism of the chemical reaction, increasing the concentration of the product will inhibit the occurrence of side reactions. As for the specific theoretical value, I really don’t know, and I hope you experts can give me some advice!
I agree with what was said above. The side reaction in the reduction furnace itself generates DCS. I personally think that 1-2% is not enough to affect the overall trend. :)
DCS can be used for restoration. The effect is better than TCS and the temperature requirements are lower, but I don’t know if it will generate other things.
The sum of DCS and TET accounts for less than 5% of the total TCS, and the impact is not significant.
Pure trichlorosilane and hydrogen generate about 1-2% DCS, which seems to have no impact at present.