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Feed rate of polysilicon

2009-02-18View Original

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What is the maximum feed rate of polysilicon that is optimal?
Reply #22009-02-18
I have my own process conditions; are you asking about what kind of materials to use?
Reply #32009-02-18
:'( :'( The OP’s topic is good, but the content is vague? ? ? ? ? ? ? ? ?
Reply #42009-02-18
Are you asking about the feed rate of the reduction furnace? The feeding amount varies depending on the pressure and ratio.

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