Does fluorinated oil have an effect on polysilicon dielectrics?
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For hard-sealed valves supplied by manufacturers, a layer of fluorine-based oil is applied to the valve chamber and seat. It is not clear whether this has any impact on media such as trichlorosilane and hydrogen. Do any experts or professionals have knowledge in this area? Could we discuss it and get some advice? Thank you
Definitely not; fluorinated greases are used for corrosion prevention. They also facilitate installation. We specialize in producing fluorinated oils. In the polysilicon industry, there are many recommendations. For example: 1. On vacuum pumps, due to the presence of corrosive gases, fluorinated greases must be used. 2. For seals, perfluorinated seals are generally recommended.
Excuse me, sir upstairs: does fluorinated grease really have no impact at all? Pipes and valves that serve as contact media for polysilicon generally need to be cleaned and degreased.
No. But I must emphasize that it has to be perfluoropolyether. Perfluoropolyether lubricants are mainly divided into two types: 1. Perfluoropolyether lubricating oils. 2. Perfluoropolyether grease. Perfluoropolyether soap base + perfluoropolyether lubricant. I’m not sure about the components of non-perfluoropolyethers. Perfluoropolyethers do not contain any fats; in them, F replaces H, and there are very few C-F and H-F bonds. Most devices come with recommendations. If needed, I can help you look for it. This post was last edited by xlxderun on 2009-2-28 07:12]
It has no impact. The entire production system is so large – what does a little impurity matter?
Opposed to the answer for the fifth floor!