Discuss the impact of nitrogen on polysilicon production
Thread Content
In polysilicon production, before trichlorosilane (TCS) enters the Siemens CVD reactor, it needs to be under N2 protection in a storage tank. So what impact does the trace amount of nitrogen dissolved in TCS have on the CVD reaction? Please share your opinions.
It seems there’s no impact, as long as the nitrogen is of Qualified quality
As far as I know, it doesn’t seem to have any effect :)
The effect of high-purity nitrogen is that corrosion is reduced. If that’s the case, [This post was last edited by fantian on 2009-3-12 01:38]
Generally 99.999% nitrogen, dew point -60
It has very low solubility in SL, and it does not liquefy either! ! The impact is negligible!