Flow measurement of ozone and oxygen
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Which flow meter is better to use to measure the flow of oxygen and ozone?
An oxygen orifice plate is sufficient, but pay attention to the material.
You can use an orifice flow meter to measure oxygen, but it needs to be oil- and ester-free!
I have never come across an orifice flowmeter. Personally, I think mass flowmeters are more accurate but expensive.
Mass for gas? ? ? I have never seen such a dry thermal gas flow meter. There are some, but there are requirements for the medium. The medium composition must be stable. The key is that it cannot contain water.