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Problem with material spraying at the reducing furnace nozzles

2009-04-05View Original

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During the polysilicon production process, the air inlet nozzles of the reduction furnace sometimes spill material; however, the heat tracing pipes in the pipelines are hot. Is this due to insufficient temperature inside the furnace? Should the temperature inside the furnace be increased, or more air inlets be added, to prevent material spouting? Please, experts, give me some advice
Reply #22011-06-03
What do you mean by spraying material? Is it liquid material being sprayed?
Reply #32011-06-04
This occurs when the nozzle is too large; an excessive feeding rate at that moment disrupts the balance of the heat field, resulting in material spraying
Reply #42011-06-07
In the liquid phase, I think it has little to do with the nozzle and the temperature inside the furnace. Solution 1: Extend the heating pipeline. 2: Reduce the feed rate to the reduction furnace; one should not simply pursue higher production by increasing the feed rate
Reply #52011-06-22
The amount of trichlorosilane that enters in an instant is too large; due to previous internal leakage in the valve, waste substances accumulate inside the pipes, and liquid is sprayed out when the valve is opened – which is normal.
Reply #62011-06-23
Reply to 1# Suixinzi: It means that the feed enters the furnace before it has been fully vaporized, right? I think the problem lies mainly with the evaporator. Previously, using high-pressure steam for vaporization didn’t work well; later we found that it was because the pressure was too high. Once the pressure was reduced, the vaporization issue disappeared!
Reply #72011-06-23
The main reason lies in the mixer; let’s first talk about your mixer

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