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English Translations » 信息处理 » Books and literature on chlorosilanes

Books and literature on chlorosilanes

2009-04-10View Original

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I hope experts can recommend some books and literature on the production processes, physical and chemical properties, and exhaust gas treatment of polysilicon, silicon trichloride, and other chlorosilanes? The PDF version is best; thanks in advance!
Reply #22009-04-10
You can go to the different sections to take a look; there, many materials and books on this topic are shared.
Reply #32009-04-10
Ah, it’s very difficult to find information on this topic. Check the database to see if there are any relevant papers, or ask a classmate to look in the school’s database

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Translated at 2026-07-28 00:35:11

Original: https://bbs.hcbbs.com/thread-439602-1-1.html

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