What is the operational difference between starting up and shutting down a reduction furnace when it is under vacuum?

2009-04-15View Original

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What is the operational difference between starting up and shutting down a reduction furnace when it is under vacuum?

Reply #22009-04-17

There isn’t much of a difference. When starting the furnace, the silicon core is smaller and less gas is used to prevent it from being blown over; when shutting down the furnace, there’s not as much need to worry about this. However, the furnace needs to be purged with nitrogen for a longer period, otherwise too much chlorosilane gas will accumulate, giving off an unpleasant odor

Reply #32009-04-17

In fact, the operations are the same in all cases, with one exception: the manual valve on the exhaust pipe must be opened when starting the furnace.

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