What processes and equipment are interlocked in the polysilicon production process?
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Please help. In the polysilicon production process, what process interlocks or equipment interlocks are generally set up?
The power supply start and stop of the reduction furnace, the water system pumps and valves, the hydrogen production system device start and stop, the feed valve, pump, exhaust valve, the connection between the flammable and toxic system and the exhaust fan, the internal interlocking of other subsystems, and the loop control interlocking.
The pressure of the reduction furnace suddenly increased, the system heat transfer oil and circulating water stopped, and the hydrogen pressure was extremely high. This was mainly due to system safety and environmental protection.