What processes are commonly used for silane purification in the polysilicon production process via the silane method?
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What are the common processes used for silane purification in the polysilicon production process via the silane method? Please provide a detailed explanation.
Apply pressure and lower the temperature to turn the silane into a liquid state, then use distillation, which is both traditional and simple
The silane is compressed and cooled step by step to a liquid state; low-boiling and high-boiling point distillation is carried out based on the different boiling points of the impurities in the silane, and filtration is performed using 4A molecular sieve
This is generally purified at low temperatures, with liquid nitrogen being used as the refrigerant
They’re all legends! It would be great if it were that simple.