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Conditions for disproportionation reaction

2010-04-09View Original

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During the production of polysilicon, dichlorosilane and silicon tetrachloride, which are by-products of this process, undergo a disproportionation reaction to produce trichlorosilane. What equipment is required, what are the reaction conditions, and what issues need to be taken into consideration during technical upgrades? Can those who know reveal a bit!
Reply #22010-04-09
I know about this matter, but I’m not exactly sure what the reaction should be; I’ll check the relevant manual
Reply #32010-04-10
This is a patent, so I can’t tell you about it
Reply #42010-04-10
Catalyst, oh catalyst—that damned catalyst
Reply #52010-04-10
I believe there are still capable people in Haichuan who are willing to share something. . . . . Looking forward to it. . . .
Reply #62010-04-10
The manufacturing process is extremely simple; it’s just that the catalyst is mysterious. However, I guess no one will reveal any specific information about it, nor does anyone dare to do so
Reply #72010-04-10
7# Minos does a better job in terms of following the general trend
Reply #82010-04-10
:Lol, at normal pressure it’s around 80 degrees; it seems to be some kind of resin catalyst. Rohm and Haas produces such catalysts; contact number: 02138513067
Reply #92010-04-13
It was still the info provided by the guy on the 9th floor that was useful, hehe. The catalyst is available, and its quantity is also important, hehe. It is estimated that trying to figure it out on one’s own will also incur significant costs.
Reply #102010-04-13
What I read in the literature is that the reaction is SiHCl3 → SiH2Cl2 + SiCl4, under conditions of 350 K, with a polyester as the catalyst (the specific name isn’t mentioned in the literature); this is exactly the opposite of the reaction you’re discussing! Handbook Of Semiconductor Silicon Technology

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