How to reduce boron and phosphorus content during the purification process of trichlorosilane
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What is the form of boron and phosphorus in trichlorosilane? During the production process, the higher the boron content, the lower the discharge rate, and the higher the phosphorus content, the higher the discharge rate.
The concept is wrong ~ B is not all at low boiling point P is not all at high boiling point
The cost of arranging too much is rising! Moreover, boron is not always low, phosphorus is not always high, and the form is also unstable! ~
So how should it be reduced?