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What are the requirements for impurity levels in dichlorodihydrosilicon entering the reduction furnace?

2010-06-15View Original

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As is well known, it is beneficial to introduce an appropriate amount of dichlorodihydrosilane into the reduction furnace. However, it currently seems more difficult to obtain high-purity dichlorodihydrosilane than high-purity trichlorohydrosilane. Therefore, I would like everyone to discuss what requirements should be placed on its impurity levels (such as B and P) if dichlorodihydrosilane is to be introduced into the reduction furnace Everyone is welcome to discuss!
Reply #22010-06-16
This requires continuous experience accumulation, but it is believed that the content of dichlorodihydrosilicon should not be too high
Reply #32010-07-14
Same request! I only know that polysilicon produced from recycled materials has better quality than that produced from synthetic materials, and this is probably because recycled materials contain a certain proportion of dichlorodihydrosilicon!
Reply #42010-07-15
A certain amount of dichlorodihydrosilicon is beneficial, as it not only prevents the reduction of trichlorohydrosilicon to dichlorodihydrosilicon but also increases the growth rate of silicon rods. However, its concentration should generally not exceed 5%, as too high a level can result in the silicon rods growing in a more fluffy manner; it is also said that this can cause the temperature in the reduction furnace to rise \"for no apparent reason\", though the reason for this is unknown…
Reply #52010-09-17
I have a gentle question: what does the impurity content of dichlorodihydrosilane mean? Do you plan to use pure dichlorodihydrosilane for the reduction process? Could the impurity level of dichlorodihydrosilicon be different from that of the trichlorosilane feedstock?
Reply #62010-09-20
Dichlorodihydrosilicon cannot be considered an impurity during the reduction process; to be precise, it is considered a component

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