Analysis of boron and phosphorus in trichlorosilane
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Do anyone have good methods for analyzing boron and phosphorus in trichlorosilane? Looking forward to sharing!
Discussions have already taken place on the forum: http://bbs.hcbbs.com/viewthread.php?tid=465895 Application of ICP—OES in determining the boron and phosphorus contents in trichlorosilane
Yes, we also use ICP-MS to measure B
3rd floor, Tristan0: Since B is volatile, how can accurate measurement be achieved using ICP-MS?
Reply to 4# Egu Ting: I myself am skeptical about this method as well. The methods used for MS measurement are basically digestion-based, and it’s difficult to ensure that no boron is lost. Looking forward to the detailed method.