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Analysis method for determining carbon content in trichlorosilane

2010-08-03View Original

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The carbon content in our company’s silicon trichloride products is high. I would like to ask the experts for methods to analyze the carbon content in silicon powder and silicon trichloride.
Reply #22010-08-04
Using a carbon-sulfur analyzer is convenient and fast, and the data obtained is relatively accurate
Reply #32010-08-04
Reply to 2# xxl555: Can trichlorosilane be tested using a carbon-sulfur analyzer? As of now, I haven’t heard that the carbon content can be measured using trichlorosilane; from what I know, carbon content can only be determined in finished silicon products.
Reply #42010-08-04
Reply to 2# xxl555: Your level is completely that of a primary school student. Understand the question first before trying to answer others’ questions – doing this is misleading others! It’s very bad!
Reply #52010-08-04
Reply to 3# cpz68868739: The carbon content in trichlorosilane can be measured! And this is one of the most major problems in the polysilicon industry at present: too high carbon content!
Reply #62010-08-04
In the industrial production of silicon powder, it is typically obtained by reducing silica with carbon in an electric furnace. Chemical reaction equation: SiO2 + 2C → Si + 2CO. The silicon obtained in this way has a purity of 97–98% and is known as metallic silicon. It is then melted and recrystallized, with impurities removed using acid to obtain metallic silicon with a purity of 99.7~99.8%. To turn it into silicon for use in semiconductors, it must first be converted into a liquid or gaseous form that is easy to purify, and then polysilicon is obtained through distillation and decomposition processes. To obtain high-purity silicon, further purification is required. The carbon content of silicon powder is approximately 0.2–0.05%, and it can be determined using infrared detection. It is relatively difficult to detect the carbon content in trichlorosilane; the sample can be analyzed by infrared spectroscopy after being compressed, or it can also be analyzed using MS. The control requirements for carbon content in solar polysilicon are not stringent; those below 1 ppm can be considered low-carbon monocrystalline. When the carbon content exceeds 3 ppm, its harmful effects become quite significant. For semiconductor polysilicon, the carbon content requirements are:
Reply #72010-08-04
I’m not very clear about this aspect either; I came here to learn* just like LZ.
Reply #82010-08-06
Experts from the polysilicon company are here to help with reapplying it~ Since trichlorosilane is very unstable. Besides, the carbon content in your trichlorosilane can’t be high, right? Since the carbon content in the raw materials has been controlled, the carbon content in the silicon powder can be determined using an infrared sulfur-carbon analyzer. The reason for the high carbon content in the synthesized trichlorosilane is that the low-boiling compounds were not removed through distillation; do you know from chromatographic analysis which substances are present in excess?
Reply #92011-01-28
The determination of carbon content in trichlorosilane can be carried out using GC-MS
Reply #102011-01-29
Using a carbon-sulfur analyzer is convenient and fast, and the data obtained is relatively accurate
Reply #112011-01-30
Reply to 4# SHANGCHUAN :dizzy: I’m really too meddling; I got carried away helping others, and it was all for nothing. Thank you for your advice, sir; I won’t meddle in others’ affairs anymore :handshake

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