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How to remove nitrogen in the CDI workshop during polysilicon production

2010-10-26View Original

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In the polysilicon production process, the hydrogen gas in the CDI workshop always contains a small amount of nitrogen. How can we use existing processes to reduce or remove this nitrogen, or how can we improve these processes in order to eliminate nitrogen and increase the purity of the hydrogen gas? Thank you for your advice; let’s learn from each other*
Reply #22010-12-25
May I ask the original poster, where does the nitrogen come from?
Reply #32010-12-25
Reply to 2# cai*aoming: There may be a small amount of nitrogen in the exhaust gas coming from the reduction workshop. A small amount of nitrogen enters during the shutdown and replacement process of the reduction furnace. I’m not sure if this is correct
Reply #42010-12-25
Perhaps discharge the gas with released pressure from pressure swing adsorption to the waste gas and waste liquid treatment workshop

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