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English Translations » 信息处理 » On the issue of the specific consumption of trichlorosilane

On the issue of the specific consumption of trichlorosilane in polysilicon production

2010-10-30View Original

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I wonder how other manufacturers calculate the specific consumption of trichlorosilane? Which one is the most accurate calculation method?
Reply #22010-11-02
Unit consumption = Total amount of chlorosilane used (KG) / Total output of polysilicon (KG) = KGSIHCL3.KGSI
Reply #32010-12-01
Total amount of trichlorosilane used? Should the quantity recycled be removed?

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Translated at 2026-07-24 22:31:57

Original: https://bbs.hcbbs.com/thread-752797-1-1.html

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