Several vaporization methods of trichlorosilane in polysilicon reduction

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1. Bubble vaporization: The bubble vaporization method involves using hydrogen bubbles in the liquid phase of trichlorosilane. At the same time, an external heat source is used to supply heat, causing trichlorosilane to vaporize; the bubbling of hydrogen accelerates the evaporation of trichlorosilane. A mixture of hydrogen and trichlorosilane is obtained. 2.2 Tubular vaporization: In this tubular vaporization method, liquid trichlorosilane is directly vaporized under the heating effect of an external heat source; the temperature of the saturated gas after vaporization is controlled so that it can mix thoroughly with hydrogen at a certain flow rate. A mixture of hydrogen and trichlorosilane is formed. Uebi| ； Tubular vaporization involves passing liquid trichlorosilane and hydrogen together, with flow rates being controlled. It enters a mixer and then a Liebig tube. Heat is supplied using the off-gases generated by reduction reactions or thermally deionized water to vaporize liquid trichlorosilane.