Discussion on the hydrogenation of silicon tetrachloride
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In a thermal hydrogenation furnace, if the reaction temperature is too high, exceeding 1300 degrees, does it have an impact on the conversion rate of silicon tetrachloride?
In the reduction reactor, graphite rods are used as the heating material; electric heating is employed to maintain the temperature inside the reactor at around 1250°C, while the pressure within the reactor remains in the range of 0.25–0.40 MPa. Depending on the actual situation, it is sometimes between 900 and 1400℃
Our process operates at 450–500 degrees Celsius and 0.15 MPa gauge pressure.
The post on the 2nd floor is off-topic; CVD is not the poster’s problem
Regarding the hot hydrogenation furnace, with such high temperatures, what are the requirements for the valves? Which brand of valves is usually used? Thank you!