Content of dichlorodihydrosilicon in the recycled material
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Everyone, what determines the content of dichlorodihydrosilicon in the materials fed into the furnace for dry recovery? Is the content of dichlorodihydrosilicon in the recycled material related to the reduction and deposition rate? Please share your valuable experience; thank you!
The temperature controlled in the reduction furnace is closely related to the molar ratio
Generally, the amount of DCS in exhaust gases is not very high
If pure trichlorosilane is used, approximately 1% dichlorodihydrosilane is generated. Then the recycled material keeps accumulating and gradually rises. The deposition temperature of DCS is lower than that of trichlorosilane, which increases the deposition rate; however, too high a temperature is not desirable either.
Do everyone handle it this way? It seems that resolving the issue with dichlorodihydrosilicon would require a significant investment~ Moreover, it’s very difficult to set up the necessary systems!