How much DCS should be contained in the TCS fed into the reduction furnace?
Thread Content
Generally, the TCS fed into the reduction furnace contains a certain amount of DCS; an excessive amount of DCS is not conducive to the progress of the deposition reaction. May I ask what the appropriate DCS level is for experts?
I heard from Americans that the DCS content is between 5 and 10, and DCS can catalyze the deposition of TCS and hydrogen.
I’d like to ask gently, what does DCS mean? It doesn’t seem like a distributed control system, does it?
The amount of DCS cannot exceed 5%
In the article \"Advancements in the commercial production of polysilicon\", there is a sentence that states: Although the process is often referred to as the TCS Siemens process, as shown in the above reactions, dichlorosilane (DCS) plays a role in this process and contributes to the production of polysilicon. For this reason, most polysilicon producers choose not to separate DCS from TCS. As a result, the TCS stream typically contains 6% to 9% DCS.
The authenticity of practical experience far exceeds any figures mentioned in articles, because some of those figures are not reliable. . .
Reply to 5# zq1981110719: Beautiful sister, could you send me a copy of this article? My email address is wangenjunlulu@163.com, thank you!~
Reply to 2# hp3784: What is the unit for 5 to 10? Thank you!
Reply to 3#: Restore beginner-level TCS trichlorosilane and DCS dichlorodihydrosilane
Reply to 5# zq1981110719: Could you send me this article? Thank you. gysml@163.com
I would like to ask everyone a question: in some domestic purification processes, a distillation tower is used, with some saying it is intended to remove DCS, while others say it is used to remove nitrogen. MSA doesn’t have this tower; then why is it necessary to install it? The tower includes various auxiliary devices, pipes, parts, etc., and all of that represents a considerable cost