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It has been observed on multiple occasions that the temperature of the furnace tube water drops after atomization in the reduction furnace; I’m quite puzzled and hope someone with more experience can shed some light on this ?
Could it be that at this moment, someone set the atomization temperature too high, which increased the flow rate of the cooling water and thus led to a drop in temperature?
After atomization in the reduction furnace, trichlorosilane needs to absorb a large amount of heat to turn into saturated steam, resulting in an energy imbalance. This causes the surface temperature of the silicon rods in the reduction furnace as well as the temperature inside the furnace chamber to drop sharply; in mild cases this leads to a decrease in the temperature of the cooling water, while in severe cases it results in immediate cracking of the rods
Atomization occurs when the water flow rate to the furnace barrel decreases; please pay close attention to this, OP.
Reply to 1# Bach: Which type of phenomenon can be defined as \"atomization\"? What impacts does it have on deposits in reduction furnaces, and how should it be dealt with once it occurs? ? ? ?
Reply to 1# Bach: Agree with the view in floor 3!
During atomization, the heat radiated by the silicon rod to the furnace wall decreases, while the heat carried away by the exhaust gases increases. This results in a decrease in the heat absorbed by the furnace water, so both the flow rate and temperature of the furnace water decrease.
:Victory: They’re all experts, haha
Reply to 3# zhufeng2: Why doesn’t trichlorosilane turn into saturated vapor before atomization in the reduction furnace, but rather after atomization? I hope for your guidance~