Ways to remove carbon
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In polysilicon, is the carbon component mainly derived from chlorosilanes, hydrogen, or graphite? Everyone, share some opinions.
Based on an analysis of our production process (we use thermal hydrogenation), the graphite components inside the hydrogenation furnace are the main sources of CH4 generation. Since there is no separate recovery system for the hydrogenation exhaust gases and the reduction exhaust gases, the CH4 present in these exhaust gases ends up entering the reduction furnace along with the recovered hydrogen, which leads to an excessive carbon content in the silicon rods. The graphite base of the reduction furnace can also cause C contamination in silicon rods, although the level of contamination is minimal.
Reply to 2# sdkjdxlhl: The analysis is really thorough