How to control atomization in the reduction furnace
Thread Content
At higher temperatures in the later stages, a lower ratio can lead to fogging; once fogging occurs, the temperature inside the furnace becomes very high. How can this temperature be reduced? How to control the material amount – increase the ratio or reduce it while keeping the ratio unchanged?
It is recommended that you increase the ratio slightly in the later stages, or in the last two feeding records in the feed schedule, so as not to reduce the mixture ratio. After increasing the ratio, pay attention to the temperature; it shouldn’t be too high.
Reply to 2#: People can be arrogant. In the later stages, should the concentration of trichlorosilane or that of hydrogen be increased?
Reply to 2#: If a person is proud and doesn’t reduce the air-fuel mixture ratio, the temperature inside the furnace becomes very high, which easily leads to increased atomization. . .
Let’s see how severe the misting is...
Reply to 5# yuan Xiaojun: Why does high temperature worsen atomization?
Let’s first analyze what atomization entails. As I understand it, atomization involves liquid material entering the reduction furnace; this liquid material reacts inside the furnace, not on the surface of the silicon rods, to produce amorphous silicon. If that’s the case, we should increase the proportion of certain components, introduce hydrogen, and if necessary, reduce the amount of material used. I’ve removed the bricks; now I’m waiting for everyone’s feedback
I’m not quite sure why higher temperatures worsen atomization; generally, higher temperatures should lead to more intense reactions, and that’s based on practical experience. . .
Reduce the feed rate; if the rod temperature is high, reduce the current. Determine by yourself how much to reduce the feed rate. Ensure strong atomization – don’t be casual about it
We reduce the amount of trichlorosilane, decrease the hydrogen flow rate, and lower the current appropriately