I would like to ask the leaders: is it necessary to detect flammable or toxic gases during the distillation and purification process of polysilicon?
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The process materials include trichlorosilane, tetrachlorosilane, etc. Is it necessary to install detectors for flammable or toxic gases?
This really exists. And there are still quite a few points that need to be measured.
Yes, I’ve seen them at the polysilicon project in Qujing, Yunnan – H2, HCL, CL2!
It is necessary to set this up, as the boiling point of the process material, trichlorosilane, is only 31.5 degrees. It is a flammable, volatile, and toxic gas; if it leaks into the air, it will react with the moisture present in the air to produce hydrogen chloride and hydrogen. There’s no need to explain what these two substances are. Although silicon tetrachloride is non-flammable, it has a relatively low boiling point of 57.6 degrees, and it is also a toxic substance; it reacts with air to produce hydrogen chloride. Some companies use hydrogen in the distillation process as well. In any case, I believe it is very necessary to install detectors for flammable and toxic gases in such processes. If there are no detectors for chlorosilanes, then detectors for hydrogen chloride and hydrogen can be used instead