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Reduction furnace popcorn

2011-06-13View Original

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The polysilicon produced these days often develops popcorn-like defects; how can we avoid this phenomenon more effectively? How should factors such as temperature, feed rate, ratio, and pressure inside the furnace be controlled? Could any teacher give some guidance? Thank you! :handshake
Reply #22011-06-14
You have to figure this out on your own; what others tell you may not apply, as the manufacturing processes and conditions vary from one factory to another.
Reply #32011-06-14
Thank you! I’m also constantly exploring right now
Reply #42011-06-16
If it is concentrated only in the upper part and the tooth depth does not exceed 25%, there is no need for modification
Reply #52011-06-30
I agree with king2401’s view; it’s normal to have some popcorn formation. I think it’s a problem related to the feed flow rate – too fast a feed rate can lead to popcorn formation, and silicon rods tend to produce loose material, which affects product quality. You can conduct experiments on the others by yourself; with all other conditions remaining constant, changing another factor should yield results.
Reply #62011-07-03
These are all confidential; how can I give them to you? Even if I did, you wouldn’t be able to adapt to them
Reply #72011-07-03
The reason for insufficient feeding at the upper part varies depending on the process conditions. Under normal circumstances, considering increasing the feed rate for testing might be an option. You provide your supply conditions, and everyone will analyze them for you.

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