Polysilicon testing

2011-07-18View Original

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What instruments are used to measure base phosphorus, base boron resistivity, minority carrier lifetime, oxygen and carbon concentrations, and matrix metal content respectively?

Reply #22011-07-28

They are respectively: FT-IR resistivity meter, minority carrier lifetime tester, FT-IR ICP-OES

Reply #32017-05-21

cryosas low-temperature infrared ICPMS

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Polysilicon testing

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