Control of the mol ratio in the later stages of polysilicon production
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As the polycrystalline silicon rod grows, it provides a larger deposition area. If the reduction atmosphere becomes more intense at later stages, it is estimated that the deposition rate of polycrystalline silicon can be increased; therefore, I believe it is beneficial to appropriately increase the molar ratio of hydrogen to trichlorosilane at those later stages. I’m curious to hear what other sailors think – let’s discuss it!
It depends on the quality and quantity of the hydrogen being recovered
As the polycrystalline silicon rod grows, it provides a larger deposition area; if the reduction atmosphere is made more intense at later stages, it is estimated that the deposition rate of polycrystalline silicon can be increased. Therefore, I believe that increasing the mol ratio of hydrogen to trichlorosilane appropriately at later stages is beneficial. There’s some truth to it!
What is the relationship between the deposition area and the ratio? There shouldn’t be any necessary connection between the two, right?
Reply to 23#: It’s due to the increased surface area after defecation; as a result, the reaction area also increases. However, a large amount of hydrogen can lead to uneven temperature distribution, causing the outer part of the crossbeam to burn while the inner part remains intact, which results in operational failure. Due to the small quantity and insufficient carrier, the TCS concentration is high, leading to atomization and loss of raw material. Summary: If the heat loss of the equipment is low, it can operate at high temperatures with a high concentration ratio later on, but this should not be done for too long ； If the equipment is of poor quality, it is still advisable to reduce the temperature control to moderate levels in order to ensure operational time. size]