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What to do if the reduction system loses hydrogen

2011-09-20View Original

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As mentioned, the emergency plan if this happens
Reply #22011-09-20
In normal production, hydrogen and trichlorosilane react in a certain proportion. If hydrogen cannot be supplied in a short time, you can consider reducing the material and current. Wait until the hydrogen gas is restored, and then slowly restore the material volume and current. If the hydrogen is completely cut off, you can consider shutting down the furnace.
Reply #32011-09-23
Immediately cut off the TCS, and then reduce the current appropriately to prevent the silicon rod from melting.

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