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What determines the feeding ratio in the reduction furnace?

2012-03-10View Original

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What determines the feeding ratio in the reduction furnace? Is the ratio related to the size of the reduction furnace?
Reply #22012-03-10
What kind of level is this, posting such a thing? The ratio refers to the molar ratio of hydrogen to trichlorosilane during feeding
Reply #32012-03-10
The ratio refers to the molar ratio of hydrogen to trichlorosilane at the time of feeding. The value of this ratio has nothing to do with the size of the furnace; whether it is 24 to 18 or 12 to 48, the ratio is independent of the furnace’s size. The value of this ratio is adjusted gradually over the duration of furnace operation, but the changes are not significant. We learned about ratios in junior high and high school; it’s determined by what gives the highest reaction conversion rate
Reply #42012-03-10
The dominance on the second floor is amazing, hahaha

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