排気ガス中のHFおよびHCl含有量分析
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排気ガスは主に空気で、HF
レーザー赤外線ガス分析計を使えば可能だが、チューニングレーザー方式の方が良い。 これら2つの成分はどちらも水に非常によく溶けるため、サンプル処理システムが鍵となります。
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