【Ten Years of Rapid Development in Chemical Processing Equipment】895-2023: China’s First Tubular Bundle Container for Phosphine and Hydrogen Mixtures

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A decade of rapid development in chemical processing equipment; praise for the prosperous and strong China. This is just a starting point to encourage more participation from everyone. Haichuan becomes even better with your involvement – we welcome all to join in the forum discussions and exchanges. ********************************************* Shijiazhuang Anrekuo Gas Machinery Co., Ltd., a subsidiary of CIMC Anrekuo (hereinafter referred to as “Shijiazhuang Anrekuo”), has successfully delivered the first tubular container in China designed for storing mixtures of phosphine and hydrogen, marking a new breakthrough in the field of equipment for storing and transporting electronic gases in our country. This tube bundle container was independently developed by CIMC Enrico; it is a special type of equipment designed for the bulk storage and transportation of mixtures of phosphine and hydrogen. In semiconductor manufacturing processes, a mixture of phosphine and hydrogen gas at a certain concentration is often required; this type of gas falls under the category of electronic gases. Currently, the storage and transportation of such gases in the market relies mainly on high-purity high-pressure cylinders (Y-ton cylinders) and small cylinders. The tubular container delivered this time can store 13 m3 of gas, and the amount of gas that can be transported in one shipment is equivalent to that stored in 200 small cylinders, thereby significantly reducing the operating costs for gas suppliers and meeting the large demand for gas in the semiconductor industry. At the same time, since the mixture of phosphine and hydrogen is highly flammable and highly toxic, this equipment is designed to be leak-free, with track welding used entirely between the pipelines and valves, thereby greatly enhancing the safety of the product.