Thread Content
A polycrystalline silicon reduction furnace includes a furnace body (1), a chassis (3) provided below the furnace body (1), an electrode (12) provided on the chassis (3) and a silicon core (13) installed corresponding to the electrode (12), an air inlet pipe (6) and an air outlet pipe (8) provided below the chassis (3), the air inlet pipe (6) is connected to a nozzle (7) installed on the chassis (3), and the air outlet pipe (8) is connected to the installation The tail gas outlet (15) on the chassis (3) is connected, and the furnace body (1) is provided with a jacket. The jackets are respectively connected with the furnace body cooling water inlet pipe (9) and the furnace body cooling water outlet pipe (10). The chassis (3) is provided with a chassis cooling water inlet pipe (4) and a chassis cooling water outlet pipe (5). The characteristic is that the electrodes (12) are 48 pairs, that is, 96, evenly distributed on the chassis (3). 2. The polysilicon reduction furnace according to claim 1, characterized in that the electrodes (12) are evenly distributed along 5 circles on the chassis (3), from the inner circumference to the outer circumference, and the number of electrodes is 6 in the first circle, 12 in the second circle, 18 in the third circle, 24 in the fourth circle, and 36 in the fifth circle. 3. The polysilicon reduction furnace according to claim 2, characterized in that there are 66 nozzles (7) evenly distributed on the chassis (3) ； There are 1 exhaust gas outlets (15), which are arranged in the center of the chassis (3). 4. The polysilicon reduction furnace according to claim 3, characterized in that the nozzles (7) are evenly distributed along 5 circles on the chassis, the innermost nozzle circumference is arranged between the tail gas outlet (15) and the innermost electrode circumference, and the other nozzle circumferences are arranged between two adjacent electrode circles. From the inner circumference to the outer circumference, the number of nozzles is respectively 3 in the first circle, 6 in the second circle, 12 in the third circle, 18 in the fourth circle, and 27 in the fifth circle. 5. The polysilicon reduction furnace according to any one of claims 2 to 4, characterized in that for each circle of electrodes, two adjacent electrodes (12) are connected through electrode plates, and are connected in series to form a circuit loop through the silicon cores (13) provided on the electrodes (12).