He Yuan Gas plans to invest 684 million yuan to expand its production capacity for electronic-grade nitrogen trifluoride to 4,500 tons per year

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He Yuan Gas plans to invest 684 million yuan to expand its production capacity for electronic-grade nitrogen trifluide to 4,500 tons per year. On March 3, He Yuan Gas announced that it intends to use its holding subsidiary, Hubei He Yuan New Materials Co., Ltd., to fund this expansion project, with a total investment amount of 684 million yuan; the funds will come from Hubei He Yuan New Materials’ own resources. The project will be carried out in two phases over a period of three years, with the aim of further enhancing the company’s competitiveness in the fields of electronic specialty gases and electronic chemicals. Electronic-grade nitrogen trifluoride is an excellent plasma etching gas for the microelectronics industry, and this expansion is in line with the priorities for investment projects encouraged by the National Development and Reform Commission. According to sources in the fluorine chemical industry, on November 5, 2025, the Yichang Ecology and Environment Bureau issued the first public notice regarding the environmental impact assessment for the expansion of Hubei Heyuan New Materials Co., Ltd.’s production capacity for electronic-grade nitrogen trifluide, with a target output of 4,500 tons per year (Phase 1). According to the announcement, the project is located in the Yaojiagang Chemical Park in Yichang City, Hubei Province. The construction work includes expanding the production facility for electronic-grade nitrogen trifluide with an annual capacity of 4,500 tons, as well as the storage and filling systems and related facilities. Phase 1 will involve the construction of a plant with an annual capacity of 3,000 tons along with related facilities, while Phase 2 will see the construction of a plant with an annual capacity of 1,500 tons. Together with the existing plant with an annual capacity of 500 tons, this will result in an overall annual production capacity of 2,000 tons. The project is projected to have an investment profit margin of 24.50% and an investment payback period of 5.27 years, and it will achieve good economic benefits once operational. The announcement states that this expansion makes use of the existing utility facilities and resources in the company’s Yichang Electronic Special Gases and Functional Materials Industrial Park, offering advantages in terms of resource utilization, scale, and centralization. This enables energy savings, cost reduction, and an increase in added value. In 2022, the company announced plans to invest in the construction of this industrial park, which covers an area of 880 mu. The products planned to be produced there include electronic-grade nitrogen trifluoride, tungsten hexafluoride, silanes, and other electronic specialty gases as well as silicon-based functional materials. At present, the park’s planned products are being produced in batches on a trial basis, with the goal of achieving stable production levels gradually this year. This 4,500-ton/year expansion project is carried out on the basis of that industrial park; it will further extend the industrial chain and enhance the company’s core competitiveness.