Introduction to the typical process flow for modern ultra-pure water production

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This post was last edited by hesonchang214 on 2019-9-22 at 10:38. 1. Pre-treatment – Reverse osmosis – Purification tank – Ion exchanger – Ultraviolet lamp – Pure water pump – Water usage point. 2. Pre-treatment – Primary reverse osmosis – Secondary reverse osmosis (positively charged reverse osmosis membrane) – Purification tank – Pure water pump – Ultraviolet lamp – Water usage point. 3. Pre-treatment – Reverse osmosis – Intermediate tank – Intermediate water pump – EDI unit – Purification tank – Pure water pump – Ultraviolet lamp – Water usage point. 4. Pre-treatment → Ultraviolet sterilization unit → Primary RO unit → Secondary RO unit → Intermediate tank → EDI unit → Deoxygenation unit → Nitrogen-sealed purification tank → TOC removal UV unit → Polishing mixed bed → Ultrafiltration unit → Water usage point. The water quality meets the American ASTM standards as well as the electronic industry’s ultra-pure water quality standards (four levels: 18 MΩ*cm, 15 MΩ*cm, 2 MΩ*cm, and 0.5 MΩ*cm)