Regarding the accuracy issue of mass flow meters
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Apart from the different requirements for pressure sensors and mass flow controllers, everything else is the same. I would like to ask how to determine the accuracy of a mass flow meter, given that the gas content in the final solution is at the ppb level
It’s not easy to measure accuracy; the accuracy is determined by the manufacturer during the production process through standard testing. Only the best process conditions can be used, with efforts made to keep all components constant, as well as to maintain stable pressure and flow rates
Is there any formula that can calculate the accuracy of a mass flow meter?
This cannot be calculated, because you can’t be sure that the measured flow rate is accurate; calculation is merely a formula, and the measured values are influenced by many factors
Is there any way to determine a rough range?
Have you used a mass flow meter based on that principle before with the one you are using now?
I haven’t decided yet which type of flow meter to use, nor do I know which principle it should operate on; as long as it works, that’s fine. What’s needed now is to determine the accuracy of the flow meter. Those are the only constraints, and I don’t know how to calculate it either
The current goal is to prepare fixed-concentration trace mixed standard gases
That is the calibration issue; generally, the weighing method is used to calibrate mass flow meters.