[Ten years of major development in chemical equipment] 1418-2024 Domestic production of ultra-pure krypton and xenon gas purification devices with purity up to 6N

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2 0 2 4 happy new year * * * * * * * * * * * * * * * * * * * * * * [Ten years of development of chemical equipment] Continue to update summary posts, welcome to participate in the discussion https://bbs.hcbbs.com/thread-3576046-1-1.html (Source: Haichuan Chemical Forum Network) * * * * * * * * * * * * * * * * * Recently, the gas purification unit of Zhongke Fuhai (Zhongshan) Gas Development Co., Ltd. (hereinafter referred to as "Zhongke Fuhai"), a subsidiary of Zhongke Fuhai, was successfully put into operation, producing ultra-pure krypton and xenon products with a purity of up to 6N. The content of krypton and xenon in the air is very small, and due to the high requirements for its separation and extraction process, it is called "golden gas". 6N-level ultrapure krypton and xenon are rare in China, and their production technology was once monopolized by foreign companies. Zhongke Helium-rich adopts advanced distillation combined with purification process and equipment configuration ； It mainly uses three sets of main equipment: feed row, distillation tower, and purifier to work together to enable the raw materials to be purified efficiently. In addition, the device is also equipped with auxiliary equipment such as film presses and vacuum pumps to ensure the stability and efficiency of the production process. Finally, the krypton and xenon raw material gas can be distilled and purified from 5N purity to 6N purity or even higher. This set of equipment is designed to produce krypton gas 6000Nm³/a and xenon gas 600Nm³/a, which can fully meet the needs of high-end customers such as TSMC. In the future, Zhongke Helium will continue to delve into low-temperature distillation and purification processes, aim at the 7N purity standard, and continue to improve product quality and production efficiency to meet the growing needs of the semiconductor industry.