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The mass spectrometer of mks can’t achieve a vacuum anymore

2019-05-23View Original

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The mass spectrometer of mks: when I start the computer software and turn on the pump, the yellow light stays on and no vacuum can be achieved. I’m seeking help from experts; payment is available.
Reply #22019-05-28
Is MKS that company from Shanghai Wanji? You can check the alarm messages, which are visible on that computer screen, to see where there is a leak or if the vacuum pump is damaged
Reply #32019-05-28
Where can I check the alarm messages? Could you give some guidance? I think there’s a leak somewhere, but after checking for a long time, it’s possible that the vacuum pump is broken

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