Seek recommendations for instruments for silicon tetrafluoride content analysis
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Silicon tetrafluoride circulation gas: silicon tetrafluoride content greater than 98.5%, nitrogen content less than 0.2%; operating temperature: 20–45°C, operating pressure: 0 MPa, density: 4.64 kg/Nm3, pipe size: DN25. Hot flue gas: nitrogen 74.86–72.9%, oxygen 12.09–6.54%, carbon dioxide 4.07–6.58%, water 8.09–13.11%, NOx (equivalent to 3.5% O2) 200 mg/m3; operating temperature: 300°C, operating pressure: 0 MPa, pipe size: DN25. Are there any good devices for detecting silicon tetrafluoride content?
"Operating pressure 0MPa”? ? ? ? I don’t understand this sentence
Between slight positive pressure and slight negative pressure. .