Cryopump

2017-03-27View Original

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This post was last edited by nfy007 on 2017-3-27 at 14:54. What is the pre-cooling method for the cryopump (liquid nitrogen pump) during the first startup? Points to note during startup

Reply #22017-03-27

Test drive? No test drive plan or operating procedures? Search on Baidu; there are quite a lot!

Reply #32017-03-27

The inlet and outlet are opened, and the exhaust gas is pre-cooled~~It’s crucial to cool it thoroughly to avoid gas entrapment or cavitation~~

Reply #42017-03-28

For cold pump and pre-cooling pump, be careful to turn the shaft manually

Reply #52017-03-29

Open the inlet valve slightly and keep the blow-off valve fully open. Once the inlet pressure rises, open the inlet valve fully to start the pump

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Cryopump

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