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Electronic-grade sulfuric acid, also known as high-purity sulfuric acid or ultra-pure sulfuric acid, belongs to the category of ultra-clean, high-purity reagents. It is primarily used for cleaning and etching silicon wafers, effectively removing impurity particles, inorganic residues, and carbon deposits from the wafers. As integrated circuits (ICs) evolve toward larger scales—massive, very large, and extremely large—the degree of integration on these chips increases, the lithography lines on the wafer surfaces become more precise, and the pace of IC innovation accelerates. As a result, the requirements for the quality of electronic-grade sulfuric acid also become more stringent. Hubei Xingfu Electronic Materials Co., Ltd. (Hubei Xingfu) has made significant breakthroughs in the development of electronic-grade sulfuric acid; the quality of its products now exceeds the SEMI-C12 standard by far, reaching the same level as that of BASF, the world’s largest supplier of electronic chemicals (with metal ion levels below 10ppt). These products are being supplied steadily to several domestic 12-inch wafer factories.
Kudos to the enterprises in Hubei for achieving success.
How are the particles? Metals are relatively simple
P: 30nm particles are required starting from 12 inches
Metals are difficult to control; particles are relatively simple
There are already several electronic-grade sulfuric acid production facilities in China, and it is likely that this technology will become widely used again soon.
Warm congratulations! I also learned it*, thank you
Who has the technology for electronic-grade sulfuric acid?