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Recycle argon gas

2019-04-19View Original

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Dear experts, I would like to ask if there are any methods for recovering argon from chlorosilanes
Reply #22019-04-19
Where is argon in chlorosilanes? ? Where does argon come from? It’s to recover hydrogen, right? ?
Reply #32019-04-19
Tank for chlorosilane, ready to be sealed with argon
Reply #42019-04-19
Such an inexpensive item, with low consumption of argon for sealing – what’s there to recycle?
Reply #52019-04-19
Then use high-purity nitrogen; why use argon? I don’t understand.
Reply #62019-04-19
Whether it’s cheap or not is relative; compared to the cost of recycling, it’s very cheap, and has no value
Reply #72019-04-19
Because nitrogen causes the formation of nitrides in the reduction furnace
Reply #82019-04-19
Well, after doing the calculations, the solubility is too high; I need to add a tower as well

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