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May I ask about the conversion between PPM and leakage rate?

2017-07-21View Original

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This post was last edited by mefanfine on 2017-7-21 at 15:33. I saw the technical requirements for low-temperature valves, which specify that the leakage rate must be ≤150 ppmv. However, the readings from the mass spectrometer are given in units of Pa·m3/s, where the ‘m3’ represents cubic meters. I’m not sure how to convert these values. Find a conversion relationship like this; how is this conversion carried out? Also, is this ppm a volume ratio (ppmv) or a mass ratio?
Reply #22017-12-10
May I ask where this formula comes from?
Reply #32017-12-11
Isn’t it a very simple conversion? 1 mbar = 100 Pa, 1 L = 0.001 m3; the unit for seconds is the same. mbar * L/s = 100 Pa * 0.001 m3/s = 0.1 Pa * m3/s
Reply #42018-01-22
It’s from some technical manual; I don’t know the source

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