Is there a national standard for electronic-grade hexafluoroethane, or is there an electronic version of the SEMI standard? What are the various specifications of this product?

2015-12-11View Original

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This post was last edited by w986177019 on 2015-12-15 13:54. Are there any updated electronic versions of the SEMI standards C3.45-92 and C3.37-93? Are there any domestic national standards for these? Also, what are the azeotropic substances of hexafluoroethane? If you know, please reply. Thank you

Reply #22015-12-14

:) Did you get some rest over the weekend? Come and take a look:hug:

Reply #32016-02-06

I would like to ask whether electronic-grade fluorocarbon gases can be produced in China?

Reply #42017-11-22

The national standard that was issued in November this year

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Is there a national standard for electronic-grade hexafluoroethane, or is there an electronic version of the SEMI standard? What are the various specifications of this product?

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