Optimization and renovation project for fluorine-containing electronic specialty gases at Shandong Dongyue Lvgeng Technology Co., Ltd

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On July 14, the Huantai Branch of the Zibo Ecology and Environment Bureau accepted the optimization and renovation project for fluorine-containing electronic specialty gases carried out by Shandong Dongyue Lvgeng Technology Co., Ltd., and made it public. Project Name: Optimization and Upgrade Project for Fluorine-Containing Electronic Specialty Gases ； Construction location: Within the existing south factory area of Shandong Dongyue Green Cooling Technology Co., Ltd ； Construction investment: 5 million yuan ； Construction type: New construction ； Construction unit: Shandong Dongyue Lvgleng Technology Co., Ltd ； Construction content and scale: Build a production line for electronic specialty gases with an annual capacity of 40 tons, including 20 tons per year of electronic-grade trifluoromethane and 20 tons per year of electronic-grade octafluorocyclobutane. Electronic specialty gases are key raw materials in semiconductor manufacturing, and are primarily used in processes such as lithography, etching, film formation, cleaning, doping, and deposition. In recent years, the market size for electronic specialty gases in China has continued to grow, with significant potential for further development in the future. Against this backdrop, Shandong Dongyue Green Cooling Technology Co., Ltd., leveraging its technical expertise in the fluorine chemical industry, invested in the construction of a project capable of producing 40 tons per year of fluorine-containing electronic specialty gas materials in April 2023; this project has now been completed and accepted. To further seize market opportunities and expand its share in this sector, the company plans to invest an additional 5 million yuan in the “Optimization and Upgrade Project for Fluorine-Containing Electronic Special Gases at Shandong Dongyue Green Cooling Technology Co., Ltd.”